IEICE Transactions on Electronics E96-C(2) 289-291 2013年 [査読有り]
We have investigated on a random-texturing process for multi-crystalline Si solar cells by plasmaless dry etching, with chlorine trifluoride (ClF 3) gas treatments. The reflectance of textured surfaces was reduced to below 20% at a wavelength of 6...
SOLAR ENERGY MATERIALS AND SOLAR CELLS 94(12) 2124-2128 2010年12月 [査読有り]
Reflection loss of silicon solar cells can be reduced by texturing the surfaces. We investigated the texturization process for crystalline Si solar cells using chlorine trifluoride (ClF(3)) gas treatments. Reflectance of textured surfaces was redu...