SOLAR ENERGY MATERIALS AND SOLAR CELLS 91(19) 1800-1804 2007年11月 [査読有り]
Reflection loss of silicon solar cells can be reduced by texturization of the surfaces. In this study, single- and multi-crystalline silicon substrates were treated with chlorine trifluoride (ClF3) to create honeycomb-textured structures. We inves...
Nobuhito Kawada   Masahiko Ito   Yoji Saito   
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 45(12) 9197-9199 2006年12月
We prepared lanthanum oxynitride films on p-type Si(100) substrates by electron beam evaporation. The films were deposited by evaporating lanthanum at a substrate temperature of 300 degrees C, and introducing oxygen and nitrogen radicals into a ch...
Y Saito   T Nishizawa   M Hamaguchi   
APPLIED SURFACE SCIENCE 240(1-4) 381-387 2005年2月
The reaction between glass-like carbon (GC) and chlorine trifluoride (CIF3) gas was investigated with weight measurements. surface analysis, and gas desorption measurements, where the CIF3 gas is used for the in situ cleaning of tubes in silicon-r...