Takafumi Yamaguchi   Naoto Usami   Kei Misumi   Atsushi Toyokura   Akio Higo   Shimpei Ono   Gilgueng Hwang   Guilhem Larrieu   Yoshiho Ikeuchi   Agnes Tixier-Mita   Ken Saito   Timothee Levi   Yoshio Mita   
Journal of Microelectromechanical Systems 31(5) 802-812 2022年10月 [査読有り]
We present a self-deformable flexible tweezer capable of simultaneous mechanical handling and electrical measurements. The tweezer has a soft cantilever with the dimensions 2 mm x 8 mm x 75-100 mu m, and undergoes self-deformation. The device is s...