Explorers attempting to land on a lunar or planetary surface must use three-dimensional image sensors to measure landing site topography for obstacle avoidance. Requirements for such sensors are similar to those mounted on vehicles and include the...
I. Mitsuishi Y. Ezoe M. Koshiishi M. Mita Y. Maeda N. Y. Yamasaki K. Mitsuda T. Shirata T. Hayashi T. Takano R. Maeda
2008 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS 104-105 2008年 [査読有り]
X-ray reflectivity of an ultra light-weight X-ray optic using MEMS technologies was measured in two different energies (0.28 keV and 1.49 keV). The obtained reflectivities can be understood by considering the mirror surface structures.
Y. Ezoe M. Koshiishi M. Mita K. Mitsuda A. Hoshino Y. Ishisaki T. Takano R. Maeda
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT 579(2) 817-820 2007年9月
We present our development of novel light-weight and low-cost micro-pore X-ray optics based on the Micro Electro Mechanical Systems (MEMS) technologies. We successfully fabricated X-ray mirror chips with surface roughness less than several nm and ...
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