Explorers attempting to land on a lunar or planetary surface must use three-dimensional image sensors to measure landing site topography for obstacle avoidance. Requirements for such sensors are similar to those mounted on vehicles and include the...
Mita Makoto   Arai Makoto   Kobayashi Dai   Fujita Hiroyuki   
Proceedings ... International Conference on Motion and Vibration Control 6(2) 1067-1070 2002年
A novel micromachined actuator which is developed to produce precise and unlimited displacement. The actuator is driven by impact force between a silicon micro-mass and a stopper. A suspended silicon mass is encapsulated between glass plates and d...
P Helin   M Mita   T Bourouina   G Reyne   H Fujita   
JOURNAL OF LIGHTWAVE TECHNOLOGY 18(12) 1785-1791 2000年12月
A new micromachining process for large-scale optical cross-connects is presented. It satisfies the high-accuracy optical alignment required for free-space optics. A self-aligned batch-process allowing the simultaneous fabrication of vertical mirro...