専門・基盤技術グループ

Research Interests

センサ・半導体デバイス ,観測ロケット支援技術 ,ナノマシン ,NEMS ,sensor ,宇宙 ,MEMS ,マイクロマシン

Research Areas

Informatics / Mechanics and mechatronics /
Aerospace, marine, and maritime Engineering / Aerospace engineering /
Manufacturing technology (mechanical, electrical/electronic, chemical engineering) / Electronic devices and equipment /
Nanotechnology/Materials / Nano/micro-systems /

Awards

Jan 2020

The Institute of Electrical Engineers of Japan, Special Issue on World State-of-the-art Research on Sensors and Micromachines Best Paper Award,Electrostatic Microelectromechanical Logic Devices Made by CMOS-compatible Surface Micromachining
MITA, Makoto ATAKA, Manabu TOSHIYOSHI, Hiroshi

Oct 2012

応用物理学会, 優秀論文賞,ハードウェア記述言語を用いた集積化CMOS-MEMS 統合設計技術
小西敏文丸山智史三田信山根大輔伊藤浩之町田克之石原昇益一哉藤田博之年吉洋

Apr 2009

豊橋技術科学大学Ｇ−ＣＯＥ, ポスター発表賞,集積化ＭＥＭＳのための連成解析手法に関する研究
丸山智史三田信藤田博之年吉洋

Papers

12 3 4 5 >

Self-excited MEMS Oscillator using an Electrostatic Cantilever

Makoto Mita Hiroshi Toshiyoshi

IEEJ Transactions on Sensors and Micromachines 143(4) 55-61 Apr 2023 [Refereed]

Development and Demonstration of a Data Collection System for Sounding Rockets

Makoto Mita

AEROSPACE TECHNOLOGY JAPAN, THE JAPAN SOCIETY FOR AERONAUTICAL AND SPACE SCIENCES 21 77-82 Nov 2022 [Refereed]

A 2-Dimensional MEMS Optical Scanner for Landing Laser Rader

Makoto Mita Hiroshi Toshiyoshi

AEROSPACE TECHNOLOGY JAPAN, THE JAPAN SOCIETY FOR AERONAUTICAL AND SPACE SCIENCES 21 62-67 2022 [Refereed]

2.65Gbps Downlink Communications with Polarization Multiplexing in X-Band for Small Earth Observation Satellite.

Tomoki Kaneko Noriyuki Kawano Yuhei Nagao Keishi Murakami Hiromi Watanabe Makoto Mita Takahisa Tomoda Keiichi Hirako Seiko Shirasaka Shinichi Nakasuka Hirobumi Saito Akira Hirose

IEICE Trans. Commun. 104-B(1) 1-12 2021

Geiger-mode three-dimensional image sensor for eye-safe flash LIDAR

Takahide Mizuno Hirokazu Ikeda Kenji Makino Yusei Tamura Yoshihito Suzuki Takashi Baba Shunsuke Adachi Tatsuya Hashi Makoto Mita Yuya Mimasu Takeshi Hoshino

IEICE ELECTRONICS EXPRESS 17(11) 20200152-20200152 Jun 2020

Explorers attempting to land on a lunar or planetary surface must use three-dimensional image sensors to measure landing site topography for obstacle avoidance. Requirements for such sensors are similar to those mounted on vehicles and include the...

Misc.

<2 3 4 56

Study of Micro-Miniature JT Cooler

NISHIO Shigefumi IWAKAMI Takeshi SHIRAKASHI Ryo MITA Makoto

11(4) 29-30 Jul 2003

Impact Microactuator Driven by Electrostatic Force

Mita Makoto Arai Makoto Kobayashi Dai Fujita Hiroyuki

Proceedings ... International Conference on Motion and Vibration Control 6(2) 1067-1070 2002

A novel micromachined actuator which is developed to produce precise and unlimited displacement. The actuator is driven by impact force between a silicon micro-mass and a stopper. A suspended silicon mass is encapsulated between glass plates and d...

Self-aligned micromachining process for large-scale, free-space optical cross-connects (vol 18, pg 828, 2000)

P Helin M Mita T Bourouina G Reyne H Fujita

JOURNAL OF LIGHTWAVE TECHNOLOGY 19(11) 1793-1793 Nov 2001

Self-aligned micromachining process for large-scale, free-space optical cross-connects

P Helin M Mita T Bourouina G Reyne H Fujita

JOURNAL OF LIGHTWAVE TECHNOLOGY 18(12) 1785-1791 Dec 2000

A new micromachining process for large-scale optical cross-connects is presented. It satisfies the high-accuracy optical alignment required for free-space optics. A self-aligned batch-process allowing the simultaneous fabrication of vertical mirro...