T. Takahashi M. Mita M. Konishi K. Motohara N. Kobayashi N. Kashikawa H. Fujita H. Toshiyoshi
2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) 147-148 2014年 [査読有り]
We report the development of the visored shutter structure for astronomical instrument and the electrostatic operation in a 140K cryogenic environment without thermo-mechanical failure.
ELECTRONICS AND COMMUNICATIONS IN JAPAN 97(1) 37-47 2014年1月
An equivalent circuit model for a semiparallel plate electrostatic torsion mirror has been developed based on an electrical circuit simulator. An analytical model for the electrostatic torque has been translated into a nonlinear dependent current ...
Toshifumi Konishi Katsuyuki Machida Satoshi Maruyama Makoto Mita Kazuya Masu Hiroshi Toshiyoshi
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 22(3) 755-767 2013年6月
This paper presents a multiphysics simulation and layout design technique for complementary metal-oxide-semiconductor-microelectromechanical systems (MEMS)(CMOS-MEMS) based on an electrical circuit simulator. An equivalent circuit model for the me...
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