M. Ataka   M. Mita   H. Toshiyoshi   H. Fujita   
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 2341-2344 2013年 [査読有り]
We have successfully fabricated electrostatic microactuators in a flexible sheet (i.e. microactuators made of the flexible sheet). In this fabrication, we used Kapton® sheets (DU PONT-TORAY) of 25μm thick as the flexible (structural) material, one...
We have developed a new microelectromechanical logic device using the MEMS (Micro Electro Mechanical Systems) technology. This device consists simply of a single cantilever and two driving electrodes with two contact pads for electrostatic operati...
SENSORS AND ACTUATORS A-PHYSICAL 188 411-416 2012年12月
We report on our first X-ray imaging test of our novel ultra-lightweight and high-resolution MEMS X-ray optics for future space astronomical missions. We have fabricated a single-stage test optic made of Si from a Si (1 1 1) wafer with a thickness...
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 132(7) 189-194 2012年7月 [査読有り]
An electrostatic micro actuator with an electrical contact between the electrodes is known to show a limit-cycle behavior due to the combination of electrostatic pull-in and release. We newly used an electrical circuit simulator to make an equival...
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 132(5) 96-102 2012年5月 [査読有り]
We have developed an inertia-driven micro actuator for harsh environment of space. Different from the conventional PZT-driven or other actuators, the newly developed electrostatic mechanism is free from the material property change due to temperat...