電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 132(4) 77-85 2012年4月
An equivalent circuit model for the semi-parallel plate electrostatic torsion mirror has been developed based on the electrical circuit simulator. An analytical model for the electrostatic torque has been translated into a nonlinear dependent curr...
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 132(3) 64-65 2012年3月 [査読有り]
A newly developed multi-physics simulation tool for MEMS (microelectromechanical systems) has been applied to a branched suspension structure to study the versatility of analysis. More than two suspension modules or actuator modules can be connect...
2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) 2012年 [査読有り]
In this paper, we present demonstrations of autonomous decentralized MEMS (ADM). The ADM is a large scale array of "monolithically integrated cell", in which "microactuators" are integrated with a "micro sensor" and a "micro processing unit (MPU)"...
T. Kotani K. Enya T. Nakagawa H. Matsuhara H. Kataza M. Kawada M. Mita K. Komatsu H. Uchida K. Fujiwara S. Mitani S. Sakai K. Haze H. Kaneda S. Oyabu D. Ishihara T. Miyata S. Sako T. Nakamura K. Asano M. Tamura J. Nishikawa T. Yamashita N. Narita H. Hayano S. Oya E. Kokubo Y. Itoh T. Matsuo M. Fukagawa H. Shibai M. Honda N. Baba N. Murakami Y. K. Okamoto S. Ida M. Takami L. Abe O. Guyon T. Yamamuro
SPACE TELESCOPES AND INSTRUMENTATION 2012: OPTICAL, INFRARED, AND MILLIMETER WAVE 8442 2012年
We present the current status of the development of the SPICA Coronagraph Instrument (SCI). SPICA is a next-generation 3-meter class infrared telescope, which will be launched in 2022. SCI is high-contrast imaging, spectroscopic instrument mainly ...
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