Yoshio Mita   Naoyuki Sakamoto   Naoto Usami   Antoine Frappé   Akio Higo   Bruno Stefanelli   Hidehisa Shiomi   Julien Bourgeois   Andreas Kaiser   
Sensors and Actuators, A: Physical 275 75-87 2018年6月 [査読有り]
This paper presents a versatile chip-level wireless driving method for microelectromechanical system (MEMS) actuators. A MEMS actuator is integrated as an electrical component of a coupled LCR resonant circuit, and it rectifies the energy sent thr...