S Baba   Mori, I   T Nakano   
VACUUM 59(2-3) 531-537 2000年11月 [査読有り]
A technique to determine optical constants of thin transparent films is discussed. Instead of the combination of the transmittance and the reflectance at a particular wavelength, the transmittance spectrum for a wider wavelength range is analyzed....
The vibrational microscratch tester monitors electrically the frictional response of a scratch-stylus which is forced to oscillate on the film surface. This tester is so sensitive that it is able to detect the fracture of ceramic films less than 3...
Modeling of particle transports at high pressure sputtering has been studied. We assume that the diffusion process of thermalized particles is governed by the Poisson's equation, and this is solved by the boundary element method (BEM). The thermal...
Transport properties of sputtered particles in a gas environment have been studied at finite temperatures using a recently developed new Monte-Carlo simulation code. In this code, the thermal motion of gas atoms has been incorporated to the collis...
T Nakano   T Suzuki   N Ohnuki   S Baba   
THIN SOLID FILMS 334(1-2) 192-195 1998年12月 [査読有り]
Structural and electrical properties of the Cu-In binary system have been studied in thin films. Samples were prepared via sequential vacuum deposition and annealing. Copper of 10-40 nm thick was deposited on glass substrates first, and indium dep...
High power pulsed magnetron sputtering (HPPMS) is a variant of sputtering deposition method in that pulsed power is applied to the sputtering target with low repetition frequency and small duty ratio. It produces high density plasma intermittently...