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Researcher List >> Takeo Watanabe
 

Takeo Watanabe

 
Avatar
NameTakeo Watanabe
URLhttps://www.lasti.u-hyogo.ac.jp/english/index.html
AffiliationUniversity of Hyogo
SectionCenter for EUVL, Laboratory of Advanced Science and Technology for Industry
Job titleFull professor
DegreePh.D.(Osaka City University)
J-Global ID200901004223661630

Research Interests

 
Electronic device・Instrumentation engineering ,Applied optics・quantum optical enginnering

Research Areas

 
  • Manufacturing technology (mechanical, electrical/electronic, chemical engineering) / Electronic devices and equipment / 
  • Nanotechnology/Materials / Optical engineering and photonics / 

Research History

1234>
 
Apr 2023
 - 
Today
兵庫県立大学  学長特別補佐(先端研究担当) 
 
Apr 2023
 - 
Today
University of Hyogo   
 
Apr 2022
 - 
Today
University of Hyogo  Executive Advisor to the President 
 
Apr 2022
 - 
Today
University of Hyogo Laboratory of Advanced Science and Technology for Industry Executive Advisor to Director 
 
Apr 2015
 - 
Today
University of Hyogo Center for EUVL, Laboratory of Advanced Science and Technology for Industry Director 
 

Education

 
Apr 1987
 - 
Sep 1990
Osaka City University  Physics
 

Committee Memberships

12345>
 
2022
 - 
Today
兵庫県「次世代電池・半導体技術開発拠点推進協議会」  座長
 
2022
 - 
Today
International Conference on Photopolymer Science and Technology  President
 
2021
 - 
Today
一般社団法人 日本半導体製造協会  会員
 
Apr 2019
 - 
Today
Photomask Japan  Conference chair
 
2018
 - 
Today
International Conference on Photomask Japan  Conference Chair and Chair of the Organizing Committee
 

Awards

12>
 
Apr 2023
International Conference of Photopolymer Science and Technology, Outstanding Contributions A ward
渡邊健夫 
 
Jul 2022
研究活動教員表彰, 最優秀賞
渡邊健夫 
 
May 2016
Osaka Nuclear Society Association, The Award of Osaka Nuclear Society Association,Resist Research and Development using SR
WATANABE Takeo 
 
Jun 2013
International Workshop on EUV Lithography, Best Paper Award,R&D of EUV Lithography
WATANABE Takeo 
 
Jun 2008
International Workshop on EUV Lithography, Best Poster Award 1st Place,EUV interference lithography employing 11-m long undulator as a light source
WATANABE Takeo 
 

Papers

12345>
 
 
The X-ray absorption spectroscopy analysis of the negative-Tone PAG bound resist
Shinji Yamakawa   Tetsuo Harada   Takeo Watanabe   
Proceedings of SPIE - The International Society for Optical Engineering   12750    2023
Development of new EUV resists is required for next-generation EUV lithography. A resist in which a large amount of photoacid generator (PAG) is introduced into the polymer side chain has been reported as a high-resolution nonchemically amplified ...
 
Comparison of Photoresist Sensitivity between KrF, EB and EUV Exposure
Yosuke Ohta   Atsushi Sekiguchi   Shinji Yamakawa   Tetsuo Harada   Takeo Watanabe   Hiroki Yamamoto   
Journal of Photopolymer Science and Technology   35(1) 49-54   Dec 2022   [Refereed]
 
Development of Selenonium PAGs in EUV Lithography toward High Sensitivity Achievement
Tomohito Kizu   Shinji Yamakawa   Takeo Watanabe   Seiji Yasui   Tomoyuki Shibagaki   
Journal of Photopolymer Science and Technology   35(1) 55-59   Dec 2022   [Refereed]
 
Grazing-Incidence Soft-X-ray Scattering for the Chemical Structure Size Distribution Analysis in EUV Resist
Atsunori Nakamoto   Shinji Yamakawa   Tetsuo Harada   Takeo Watanabe   
Journal of Photopolymer Science and Technology   35(1) 61-65   Dec 2022   [Refereed]
 
R&D Activities of EUV Lithography at NewSUBARU, and Possibility of Beyond EUV
Takeo Watanabe   Tetsuo Harada   Shinji Yamakawa   
Optics InfoBase Conference Papers      2022
The R&D of basic technologies such as mask, resist, optical element, optics. have been carried out at NewSUBARU synchrotron light facility since 1996. EUV Lithography started use in production from 2019 for 7 nm node logic devices and from 2020 fo...

Misc.

<23456>
 
 
Development of a High Energy Gamma-ray Beam via Inverse Compton Scattering of Soft X-rays
16(3) 154-160   2019   
 
ニュースバル放射光施設におけるEUVリソグラフィー用マスク検査技術の開発
原田哲男   渡邊健夫   
UV/EB研究会資料   69th    2018
 
フォトダイオード直接塗布法によるEUVレジストの高精度な吸収係数測定法
新原章汰   豆崎大輝   渡辺雅紀   原田哲男   渡邊健夫   
日本放射光学会年会・放射光科学合同シンポジウム(Web)   31st    2018
 
NewSUBARU BL-3における10-300nm反射率計の構築
佐藤芙貴   原田哲男   渡邊健夫   
日本放射光学会年会・放射光科学合同シンポジウム(Web)   31st    2018
 
高次高調波EUV光を用いたコヒーレントスキャトロメトリー顕微鏡によるEUVマスク欠陥観察結果
豆崎大輝   原田哲男   永田豊   渡邊健夫   
日本放射光学会年会・放射光科学合同シンポジウム(Web)   31st    2018

Books and Other Publications

12345>
 
 
国立研究開発法人 科学振興機構 編   2023   
 
CMC出版   2022   
 
文門科学教育通信 文部科学省   2022   
 
国立研究開発法人 科学振興機構 編   2021   
 
CMC出版   2021   

Presentations

12345>
 
 
「EUVリソグラフィ」AndTech WEB講習会（オンライン）   25 May 2023   
 
Takeo Watanabe   
IEUVI Resist TWG Workshop 2023 (online)   [Invited]
 
第253回フォトポリマー懇話会講演会 先端・次世代リソグラフィ技術（オンライン）   25 Apr 2023   
 
第70回応用物理学会春季学術講演会シンポジウム マイクロ・ナノスケール微細加工の表面界面先端技術   
 
ニュースバルシンポジウム2023   13 Mar 2023   

Professional Memberships

123>
 
Mar 2023
 - 
Today
日本化学会
Oct 2021
 - 
Today
一般社団法人 次世代日本半導体製造協会
Apr 2000
 - 
Today
高分子学会
Apr 1998
 - 
Today
日本放射光学会
Apr 1991
 - 
Today
日本応用物理学会

Works

 
 
1993 - Today
 
渡邊健夫   
1993 - Today
 
1999 - 2001

Research Projects

123>
 
 
Precise measurement of optical constants of thin films in soft X-ray region
Japan Society for the Promotion of Science: Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)
Kinoshita Hiroo WATANABE Takeo MURAMATSU Yasuji 
Project Year: Apr 2015 - Mar 2018
 
Development of 1X nm EUV Resist with high sensitivity and Low LWR
Japan Society for the Promotion of Science: Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)
Watanabe Takeo HARADA Tetsuo KINOSHITA Hiroo MUTO Masao TSUNO Katsushige 
Project Year: Apr 2013 - Mar 2016
 
Resist pattern replication using EUV interference lithography for 20 nm and below
Japan Society for the Promotion of Science: Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)
WATANABE Takeo KINOSHITA Hiroo HARADA Tetsuo SHIONO Daiju 
Project Year: 2010 - 2012
 
Chemical genetics on protein acetylation, a key reaction regulating biological functions
Japan Society for the Promotion of Science: Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (A)
YOSHIDA Minoru YASHIRODA Yoko YOSHIDA Yukiko KAMEMURA Kazuo 
Project Year: 2003 - 2005
 
Fabrication of aspherical surfaces for soft X-Ray optical elements by means of Deposition techniques
Japan Society for the Promotion of Science: Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (C)
NIIBE Masahito WATANABE Takeo KINOSHITA Hiroo 
Project Year: 1999 - 2001

Industrial Property Rights

12345>
 
 
渡邊 健夫   
 
WATANABE Takeo   
 
渡邊 健夫   
 
渡邊 健夫   
 
渡邊 健夫   

Media Coverage

12345>
 
 
毎日新聞   経済特集   Sep 2022   [Newspaper, magazine]
 
化学工業日報   Nov 2021   [Newspaper, magazine]
 
MBSラジオ   こんちわコンちゃんお昼です   May 2021   [TV or radio program]
 
MBSラジオ   日曜コンちゃん おはようさん   May 2021   [TV or radio program]
 
神戸新聞   May 2021   [Newspaper, magazine]
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