Hideki Yoshikawa, Yoshiteru Kita, Katsumi Watanabe, Akihiro Tanaka, Masahiro Kimura, Atsushi Nisawa, Vlaicu A. Mihai, Masaru Kitamura, Nobuhiro Yagi, Masato Okui, Masami Taguchi, Retsu Oiwa, Sei FUKUSHIMA
Journal of Surface Analysis 9(3) 374-377 2002年 査読有り
The 3rd generation synchrotron radiation (SR) facilities have been recently built and have given us high flux and wide-energy tunable X-ray. This characteristic is useful to obtain XPS spectra excited by the high energy X-ray, which reveals the deeper layers. In this work, we used the beamline of SPring-8 BL15XU which has an revolver type undulator and a double crystal tandem monochromator and the angle-resolved XPS machine where an energy resolution is good even if X-ray energy is high up to 4500eV. For multilayers of the magnetic tunnel junction device, XPS measurement using 3000eV X-ray led to evaluate the deeper layers of a specimen and revealed the interface between Al oxide and Fe50Co50 alloy with Ta oxide or carbon protective overlayers.