Researcher Search Results Masaru Shimizu Masaru Shimizu (清水 勝) Please select the form format to download from below 「Education and research environment」format 「No. 4, the Ministry of Education document style ①Outline for Vitae」format 「No. 4, the Ministry of Education document style ②Education and research environment」format Profile Information AffiliationProfessor, Graduate School, of Engineering, Division of Electronic Materals and Devices, University of HyogoDegree(BLANK)(Kyoto University)工学修士(静岡大学)J-GLOBAL ID200901041853829478researchmap Member ID1000027546External linkhttp://www.u-hyogo.ac.jp/eng Research Interests 7 ferroelectrics 電子物性 誘電体 薄膜 Electronic Science Dielectrics Thin Film Research Areas 1 Manufacturing technology (mechanical, electrical/electronic, chemical engineering) / Electric/electronic material engineering / Research History 6 2004 - 兵庫県立大学 助教授 1998 - Himeji, Institute of Technology, Associate 1982 - 1995 京都大学 助手 1982 - 1995 Kyoto University, Research Associate 1995 - 姫路工業大学 助教授 More Education 4 - 1982 Kyoto University - 1982 Graduate School, Division of Engineering, Kyoto University - 1978 Faculty of Engineering, Shizuoka University - 1978 Faculty of Engineering, Shizuoka University Papers 126 Enhancement of photovoltage by electronic structure evolution in multiferroic Mn-doped BiFeO<inf>3</inf> thin films Seiji Nakashima, Tohru Higuchi, Akira Yasui, Toyohiko Kinoshita, Masaru Shimizu, Hironori Fujisawa Scientific Reports, 10(1), Dec 1, 2020 Introduction of charged domain walls into BiFeO<inf>3</inf> thin films using a pit-patterned SrTiO<inf>3</inf> (001) substrate Seiji Nakashima, Satoshi Kimura, Yuta Kurokawa, Hironori Fujisawa, Masaru Shimizu Japanese Journal of Applied Physics, 58(SL), 2019 Peer-reviewed Composition control and introduction of an Fe<inf>2</inf>O<inf>3</inf> seed layer in metalorganic chemical vapor deposition of epitaxial BiFeO<inf>3</inf> thin films Nao Yoshimura, Hironori Fujisawa, Seiji Nakashima, Masaru Shimizu Japanese Journal of Applied Physics, 58(4), 2019 Peer-reviewed Bulk photovoltaic effects in Mn-doped BiFeO<inf>3</inf> thin films and the optical strains Seiji Nakashima, Ryu Hayashimoto, Hironori Fujisawa, Masaru Shimizu Japanese Journal of Applied Physics, 57(11), Nov, 2018 Peer-reviewed Domain structure of BiFeO<inf>3</inf> thin films grown on patterned SrTiO<inf>3</inf>(001) substrates Seiji Nakashima, Shota Seto, Yuta Kurokawa, Hironori Fujisawa, Masaru Shimizu Japanese Journal of Applied Physics, 56(10), Oct, 2017 Peer-reviewed More Misc. 170 High voltage generation by a bulk photovoltaic effect in ferroelectrics for an optical actuator application 中嶋誠二, 藤沢浩訓, 清水勝 岩谷直治記念財団研究報告書, 42, 2019 ZnOナノワイヤ上でのHf1-xZrxO2薄膜の結晶化 竹内洋平, 兼松宏行, 小高雄哉, 福島宏昌, 藤沢浩訓, 中嶋誠二, 清水勝 応用物理学会春季学術講演会講演予稿集(CD-ROM), 65th, 2018 BiFeO3薄膜のMOCVD成長における成膜圧力の影響 吉村奈緒, 田中拓人, 藤沢浩訓, 中嶋誠二, 清水勝 応用物理学会春季学術講演会講演予稿集(CD-ROM), 65th, 2018 (110)配向BiFeO3薄膜への帯電ドメインウォールの導入 黒川悠太, 中嶋誠二, 藤沢浩訓, 清水勝 応用物理学会春季学術講演会講演予稿集(CD-ROM), 65th, 2018 MnドープBiFeO3薄膜のバルク光起電力効果とそれによって発生する光誘起歪 林本竜, 中嶋誠二, 藤沢浩訓, 清水勝 応用物理学会秋季学術講演会講演予稿集(CD-ROM), 79th, 2018 More Books and Other Publications 6 誘電体材料の特性と測定・評価及び応用技術 技術情報協会, 2001 強誘電体薄膜メモリ サイエンスフォーラム社, 1995 Growth and Characterization of Ferroelectric Thin Films by Photo-CVD Process New Functionally Materials, 1993 セラミックデータブック '92 工業技術製品協会, 1992 強誘電体薄膜集積化技術 サイエンスフォーラム社, 1992 More Professional Memberships 4 May, 2020 - Present The Dielectric Society of Japan 材料研究会(MRS) 電気・電子工学学会(IEEE) 応用物理学会 Works 2 MOCVD法による高品質強誘電体薄膜の作製と物性評価 2000 - 2004 Prearafirn and characterization of high quality ferroelectric thin films by MOCVD 2000 - 2004 Research Projects 32 Fabrication of Ferroelectric Nanorod Capacitors for Ultrahigh Integrated FeRAMs Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, Apr, 2013 - Mar, 2015 SHIMIZU MASARU, FUJISAWA Hironori, NAKASHIMA Seiji Spontaneous polarization in nanosized ferroelectrics and its size dependence Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, Apr, 2012 - Mar, 2014 FUJISAWA Hironori, SHIMIZU Masaru, NAKASHIMA Seiji FABRICATION OF FERROELCTRIC ONE-DIMENSIONAL NANOSTRUCTURES AND CREATION OF FUNCTIONS Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 2010 - 2012 SHIMIZU Masaru, FUJISAWA Hironori, NAKASHIMA Seiji, HONDA Koichro Preparation of composition-and valence-controlled BiFeO_3 thin films and investigation of leakage mechanism Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 2010 - 2011 FUJISAWA Hironori, SHIMIZU Masaru, NAKASHIMA Seiji 強誘電体1次元ナノ構造の作製技術の開発と新機能応用 科学技術振興機構, 2009 - 2009 清水 勝 Study on the Fabrication of Ferroelectric Ultrathin Films and Nanostructures by MOCVD and Their Size Effects Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 2005 - 2006 SHIMIZU Masaru, HONDA Koichiro, FUJISAWA Hironori 強誘電体薄膜の物性制御と次世代メモリデバイスへの応用 科学研究費助成事業, 日本学術振興会, 2004 - 2004 奥山 雅則, 石橋 善弘, 藤村 紀文, 長 康雄, 安田 直彦, 清水 勝 MOCVD法による高品質強誘電体薄膜の作製と物性評価 科学研究費助成事業, 日本学術振興会, 2000 - 2003 清水 勝, 安達 正利, 藤沢 浩訓, 丹生 博彦 Low-Temperature Growth of Ferroelectric and Electrode Thin Films by MOCVD and Their Application to Three-Dimensional High Density Memories Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 2001 - 2002 SHIMIZU Masaru, FUJIMORI Yoshikazu, FUJISAWA Hironori, NIU Hirohiko, KADOKURA Hidekimi Analysis and Control of Ferroelectric/Semiconductor (Metal) Interface for Their Device-Application Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 2000 - 2001 NIU Hirohiko, FUJISAWA Hironori, SHIMIZU Masaru Study on the Influence of Grain Boundary of Ferroelectric Thin Films on Elelectrical Properties and Its Application to Memory Devices Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 2000 - 2001 SHIMIZU Masaru, FUJISAWA Hironori, NIU Hirohiko Size Effects of Ferrelectric Thin Films and Influences of the Size on the Thin Film Memory Device Properties Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1997 - 1998 SHIMIZU Masaru, FUJISAWA Hironori Fabrication of Ferroelectric Thin Films on Large Size Wafers at High Growth Rate by Metal Organic Chemical Vapor Deposition and Their Application to Memory Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1997 - 1998 SHIOSAKI Tadashi, ONISHI Shigeo, NAKATANI Kenichi, SHIMIZU Masaru, OKAMURA Soichirou Analysis and Control of Ferroelectric/Semiconductor(Metal)Interface for Their Device-Application Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1996 - 1997 NIU Hirohiko, FUJISAWA Hironori, SHIMIZU Masaru Investigation and Control of Ferroelectric / Conductor Interface Phenomena and Their Applications to Memory Devices Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1995 - 1996 SHIMIZU Masaru, FUJISAWA Hironori Developmental Research on Large Area Growth of Ferroelectric Thin Films with a High Growth Rate by MOCVD and Their Applications to Memory Device Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1994 - 1995 SHIOSAKI Tadashi, OHNISHI Shingo, NAKAYA Kenichi, SHIMIZU Masaru Preparation of Ferroelectric Superlattice Using Phot-excited Process and Their applications to Functional Deviccs Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1994 - 1995 SHIOSAKI Tadashi, SIMIZU Masaru 有機分子のSTM観測・凝集構造シミュレーションおよびトンネル物性に関する研究 科学研究費助成事業, 日本学術振興会, 1994 - 1994 松重 和美, 清水 勝, 堀内 俊寿 CVD Growth of Oxide Ferroelectric Thin Films and Control of Their Properties Using Photo Energy Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1993 - 1994 SHIMIZU Masaru Preparation of Ferroelectric PZT Thin Films by Photoenhanced CVD and an Application to Memory Devices Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1992 - 1993 SHIOSAKI Tadashi, SHIMIZU Masaru 光励起プロセスを用いた強誘電体薄膜の成長とその評価 科学研究費助成事業, 日本学術振興会, 1992 - 1992 塩崎 忠, 清水 勝 High Rate Growth of Large Diameter and High Quality Li_2B_4O_7 Piezoelectric Crystals and Practical Research on SAW Devices Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1991 - 1992 SHIOSAKI Tadashi, FUJIMURA Sigeto, MIWA Kazuo, SHIMIZI Masaru 光励起プロセスを用いた強誘電体薄膜の成長と機能素子への応用 科学研究費助成事業, 日本学術振興会, 1991 - 1991 塩崎 忠, 清水 勝 Preparation of Functional Ceramic Thin Films by Photo-MOCVD and their Applications to Optical Functional Devices Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1989 - 1991 SHIOSAKI Tadashi, SHIMIZU Masaru Preparation of Ferroelectric Thin Film and its Applications to Functional Devices Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1985 - 1986 ADACHI Masatoshi, SHIMIZU Masaru Growth of Piezoelectric <Li_2> <B_4> <O_7> Single Crystal and its Applications to Ultra High Frequency Surface Acoustic Wave Devices Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1985 - 1986 SHIOSAKI Tadashi, SHIMIZU Masaru, ADACHI Masatoshi 強誘電体薄膜メモリデバイスに関する研究 科学研究費補助金, 1986 強誘電体薄膜の成長とその物性に関する研究 科学研究費補助金, 1986 強誘電体ナノ構造及び極薄膜の作製と物性 Study on the Preparation of Ferroelectric Nanostructures and Ultrathin Films and Their Ferroelectric Properties Study on the Ferroelectric Thin Film Memory Devices Study on the Growth of Ferroelectric Thin Films and Their Properties 1 Industrial Property Rights 2 圧電体素子 特願2003-024452 イリジウム含有薄膜の科学気相成表法による製造方法 特願平11-377109
Masaru Shimizu (清水 勝) Please select the form format to download from below 「Education and research environment」format 「No. 4, the Ministry of Education document style ①Outline for Vitae」format 「No. 4, the Ministry of Education document style ②Education and research environment」format Profile Information AffiliationProfessor, Graduate School, of Engineering, Division of Electronic Materals and Devices, University of HyogoDegree(BLANK)(Kyoto University)工学修士(静岡大学)J-GLOBAL ID200901041853829478researchmap Member ID1000027546External linkhttp://www.u-hyogo.ac.jp/eng Research Interests 7 ferroelectrics 電子物性 誘電体 薄膜 Electronic Science Dielectrics Thin Film Research Areas 1 Manufacturing technology (mechanical, electrical/electronic, chemical engineering) / Electric/electronic material engineering / Research History 6 2004 - 兵庫県立大学 助教授 1998 - Himeji, Institute of Technology, Associate 1982 - 1995 京都大学 助手 1982 - 1995 Kyoto University, Research Associate 1995 - 姫路工業大学 助教授 More Education 4 - 1982 Kyoto University - 1982 Graduate School, Division of Engineering, Kyoto University - 1978 Faculty of Engineering, Shizuoka University - 1978 Faculty of Engineering, Shizuoka University Papers 126 Enhancement of photovoltage by electronic structure evolution in multiferroic Mn-doped BiFeO<inf>3</inf> thin films Seiji Nakashima, Tohru Higuchi, Akira Yasui, Toyohiko Kinoshita, Masaru Shimizu, Hironori Fujisawa Scientific Reports, 10(1), Dec 1, 2020 Introduction of charged domain walls into BiFeO<inf>3</inf> thin films using a pit-patterned SrTiO<inf>3</inf> (001) substrate Seiji Nakashima, Satoshi Kimura, Yuta Kurokawa, Hironori Fujisawa, Masaru Shimizu Japanese Journal of Applied Physics, 58(SL), 2019 Peer-reviewed Composition control and introduction of an Fe<inf>2</inf>O<inf>3</inf> seed layer in metalorganic chemical vapor deposition of epitaxial BiFeO<inf>3</inf> thin films Nao Yoshimura, Hironori Fujisawa, Seiji Nakashima, Masaru Shimizu Japanese Journal of Applied Physics, 58(4), 2019 Peer-reviewed Bulk photovoltaic effects in Mn-doped BiFeO<inf>3</inf> thin films and the optical strains Seiji Nakashima, Ryu Hayashimoto, Hironori Fujisawa, Masaru Shimizu Japanese Journal of Applied Physics, 57(11), Nov, 2018 Peer-reviewed Domain structure of BiFeO<inf>3</inf> thin films grown on patterned SrTiO<inf>3</inf>(001) substrates Seiji Nakashima, Shota Seto, Yuta Kurokawa, Hironori Fujisawa, Masaru Shimizu Japanese Journal of Applied Physics, 56(10), Oct, 2017 Peer-reviewed More Misc. 170 High voltage generation by a bulk photovoltaic effect in ferroelectrics for an optical actuator application 中嶋誠二, 藤沢浩訓, 清水勝 岩谷直治記念財団研究報告書, 42, 2019 ZnOナノワイヤ上でのHf1-xZrxO2薄膜の結晶化 竹内洋平, 兼松宏行, 小高雄哉, 福島宏昌, 藤沢浩訓, 中嶋誠二, 清水勝 応用物理学会春季学術講演会講演予稿集(CD-ROM), 65th, 2018 BiFeO3薄膜のMOCVD成長における成膜圧力の影響 吉村奈緒, 田中拓人, 藤沢浩訓, 中嶋誠二, 清水勝 応用物理学会春季学術講演会講演予稿集(CD-ROM), 65th, 2018 (110)配向BiFeO3薄膜への帯電ドメインウォールの導入 黒川悠太, 中嶋誠二, 藤沢浩訓, 清水勝 応用物理学会春季学術講演会講演予稿集(CD-ROM), 65th, 2018 MnドープBiFeO3薄膜のバルク光起電力効果とそれによって発生する光誘起歪 林本竜, 中嶋誠二, 藤沢浩訓, 清水勝 応用物理学会秋季学術講演会講演予稿集(CD-ROM), 79th, 2018 More Books and Other Publications 6 誘電体材料の特性と測定・評価及び応用技術 技術情報協会, 2001 強誘電体薄膜メモリ サイエンスフォーラム社, 1995 Growth and Characterization of Ferroelectric Thin Films by Photo-CVD Process New Functionally Materials, 1993 セラミックデータブック '92 工業技術製品協会, 1992 強誘電体薄膜集積化技術 サイエンスフォーラム社, 1992 More Professional Memberships 4 May, 2020 - Present The Dielectric Society of Japan 材料研究会(MRS) 電気・電子工学学会(IEEE) 応用物理学会 Works 2 MOCVD法による高品質強誘電体薄膜の作製と物性評価 2000 - 2004 Prearafirn and characterization of high quality ferroelectric thin films by MOCVD 2000 - 2004 Research Projects 32 Fabrication of Ferroelectric Nanorod Capacitors for Ultrahigh Integrated FeRAMs Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, Apr, 2013 - Mar, 2015 SHIMIZU MASARU, FUJISAWA Hironori, NAKASHIMA Seiji Spontaneous polarization in nanosized ferroelectrics and its size dependence Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, Apr, 2012 - Mar, 2014 FUJISAWA Hironori, SHIMIZU Masaru, NAKASHIMA Seiji FABRICATION OF FERROELCTRIC ONE-DIMENSIONAL NANOSTRUCTURES AND CREATION OF FUNCTIONS Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 2010 - 2012 SHIMIZU Masaru, FUJISAWA Hironori, NAKASHIMA Seiji, HONDA Koichro Preparation of composition-and valence-controlled BiFeO_3 thin films and investigation of leakage mechanism Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 2010 - 2011 FUJISAWA Hironori, SHIMIZU Masaru, NAKASHIMA Seiji 強誘電体1次元ナノ構造の作製技術の開発と新機能応用 科学技術振興機構, 2009 - 2009 清水 勝 Study on the Fabrication of Ferroelectric Ultrathin Films and Nanostructures by MOCVD and Their Size Effects Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 2005 - 2006 SHIMIZU Masaru, HONDA Koichiro, FUJISAWA Hironori 強誘電体薄膜の物性制御と次世代メモリデバイスへの応用 科学研究費助成事業, 日本学術振興会, 2004 - 2004 奥山 雅則, 石橋 善弘, 藤村 紀文, 長 康雄, 安田 直彦, 清水 勝 MOCVD法による高品質強誘電体薄膜の作製と物性評価 科学研究費助成事業, 日本学術振興会, 2000 - 2003 清水 勝, 安達 正利, 藤沢 浩訓, 丹生 博彦 Low-Temperature Growth of Ferroelectric and Electrode Thin Films by MOCVD and Their Application to Three-Dimensional High Density Memories Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 2001 - 2002 SHIMIZU Masaru, FUJIMORI Yoshikazu, FUJISAWA Hironori, NIU Hirohiko, KADOKURA Hidekimi Analysis and Control of Ferroelectric/Semiconductor (Metal) Interface for Their Device-Application Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 2000 - 2001 NIU Hirohiko, FUJISAWA Hironori, SHIMIZU Masaru Study on the Influence of Grain Boundary of Ferroelectric Thin Films on Elelectrical Properties and Its Application to Memory Devices Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 2000 - 2001 SHIMIZU Masaru, FUJISAWA Hironori, NIU Hirohiko Size Effects of Ferrelectric Thin Films and Influences of the Size on the Thin Film Memory Device Properties Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1997 - 1998 SHIMIZU Masaru, FUJISAWA Hironori Fabrication of Ferroelectric Thin Films on Large Size Wafers at High Growth Rate by Metal Organic Chemical Vapor Deposition and Their Application to Memory Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1997 - 1998 SHIOSAKI Tadashi, ONISHI Shigeo, NAKATANI Kenichi, SHIMIZU Masaru, OKAMURA Soichirou Analysis and Control of Ferroelectric/Semiconductor(Metal)Interface for Their Device-Application Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1996 - 1997 NIU Hirohiko, FUJISAWA Hironori, SHIMIZU Masaru Investigation and Control of Ferroelectric / Conductor Interface Phenomena and Their Applications to Memory Devices Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1995 - 1996 SHIMIZU Masaru, FUJISAWA Hironori Developmental Research on Large Area Growth of Ferroelectric Thin Films with a High Growth Rate by MOCVD and Their Applications to Memory Device Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1994 - 1995 SHIOSAKI Tadashi, OHNISHI Shingo, NAKAYA Kenichi, SHIMIZU Masaru Preparation of Ferroelectric Superlattice Using Phot-excited Process and Their applications to Functional Deviccs Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1994 - 1995 SHIOSAKI Tadashi, SIMIZU Masaru 有機分子のSTM観測・凝集構造シミュレーションおよびトンネル物性に関する研究 科学研究費助成事業, 日本学術振興会, 1994 - 1994 松重 和美, 清水 勝, 堀内 俊寿 CVD Growth of Oxide Ferroelectric Thin Films and Control of Their Properties Using Photo Energy Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1993 - 1994 SHIMIZU Masaru Preparation of Ferroelectric PZT Thin Films by Photoenhanced CVD and an Application to Memory Devices Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1992 - 1993 SHIOSAKI Tadashi, SHIMIZU Masaru 光励起プロセスを用いた強誘電体薄膜の成長とその評価 科学研究費助成事業, 日本学術振興会, 1992 - 1992 塩崎 忠, 清水 勝 High Rate Growth of Large Diameter and High Quality Li_2B_4O_7 Piezoelectric Crystals and Practical Research on SAW Devices Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1991 - 1992 SHIOSAKI Tadashi, FUJIMURA Sigeto, MIWA Kazuo, SHIMIZI Masaru 光励起プロセスを用いた強誘電体薄膜の成長と機能素子への応用 科学研究費助成事業, 日本学術振興会, 1991 - 1991 塩崎 忠, 清水 勝 Preparation of Functional Ceramic Thin Films by Photo-MOCVD and their Applications to Optical Functional Devices Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1989 - 1991 SHIOSAKI Tadashi, SHIMIZU Masaru Preparation of Ferroelectric Thin Film and its Applications to Functional Devices Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1985 - 1986 ADACHI Masatoshi, SHIMIZU Masaru Growth of Piezoelectric <Li_2> <B_4> <O_7> Single Crystal and its Applications to Ultra High Frequency Surface Acoustic Wave Devices Grants-in-Aid for Scientific Research, Japan Society for the Promotion of Science, 1985 - 1986 SHIOSAKI Tadashi, SHIMIZU Masaru, ADACHI Masatoshi 強誘電体薄膜メモリデバイスに関する研究 科学研究費補助金, 1986 強誘電体薄膜の成長とその物性に関する研究 科学研究費補助金, 1986 強誘電体ナノ構造及び極薄膜の作製と物性 Study on the Preparation of Ferroelectric Nanostructures and Ultrathin Films and Their Ferroelectric Properties Study on the Ferroelectric Thin Film Memory Devices Study on the Growth of Ferroelectric Thin Films and Their Properties 1 Industrial Property Rights 2 圧電体素子 特願2003-024452 イリジウム含有薄膜の科学気相成表法による製造方法 特願平11-377109