LASER-BASED MICRO- AND NANOPROCESSING XI 10092 2017年 [査読有り]
We propose a novel high aspect laser drilling technique for glass substrate assisted by supercritical CO2 instead of water. Supercritical CO2 has excellent solubility and fluidity, which facilitates efficient removal of ablated debris to the outsi...
We have developed a system for measuring the orientation of single molecules using a conventional wide-field fluorescence microscope with a polarization filter consisting of a polarizer and a compact polarization mode converter. The polarization f...
High-sensitivity, high-spatial-resolution imaging of organic monolayers on platinum with second harmonic generation (SHG) microscopy using radially polarized beam excitation is investigated. A tightly focused, radially polarized beam forms a longi...
Metallic glass alloy can be a promising structural material for MEMS application because of its superior properties. However, there was limited information on fabrication and properties of thin metallic glass films. This paper reports the metallic...
In this article, the influences of specimen size and deformation-mode on the fracture strength of single-crystal silicon (SCS) micro-beam structures are described. We have designed and developed a new materials test device that is able to apply pu...
Non-contact stress evaluation is required for nano-scale devices related to LSI and MEMS to improve their characteristics and reliability. Raman spectroscopy is known to measure surface stress of silicon without contacts and damages, but it cannot...
大学本部
工学研究科