Yuichi Haruyama   Daiki Morimoto   Akira Heya   Koji Sumitomo   Seigo Ito   Kumiko Yokota   Masahito Tagawa   
Japanese Journal of Applied Physics 60(12) 2021年12月
The effect of atomic hydrogen exposure on hydrogenated amorphous carbon (a-C:H) films was investigated by X-ray photoelectron spectroscopy (XPS). From the dependence of the wide-scan XPS spectra of an a-C:H film on atomic hydrogen exposure, it was...