Takahito Yokota Kensuke Kanda Takayuki Fujita Kazusuke Maenaka
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2023-January 709-711 2023年
This paper reports on the improvement of the output power of piezoelectric energy harvesters (PEHs). A tapered thickness structure of a cantilever beam for uniform stress, tungsten proof mass, thick piezoelectric film, and series connection of the...
Takahito Yokota Kensuke Kanda Takayuki Fujita Kazusuke Maenaka
2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022 267-270 2022年
This paper reports thickness controls for cantilever beams of the piezoelectric energy harvester (PEH). The uniform stress structure for increasing output power and fillet structures for stress concentration relief of cantilever beams were fabrica...
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工学研究科