Kanta Yamamoto   Yuichi Utsumi   Ikuya Sakurai   Ikuo Okada   Kenji Hanada   Hidehiro Ishizawa   Masahiro Takeo   Taki Watanabe   Sho Amano   Satoru Suzuki   Koji Sumitomo   Akinobu Yamaguchi   
Journal of Vacuum Science & Technology B 41(6) 062602-1-062602-8 2023年10月 [査読有り]
We have completed a system that can achieve both deep x-ray lithography and submicron x-ray lithography with a single beamline by introducing the combination of x-ray plane and cylindrical mirrors. This x-ray lithography system can provide a large...