Ippei Tanaka   Shinichiro Matuoka   Yasunori Harada   
Diamond and Related Materials 121 2022年1月 [査読有り]
This study discusses the fabrication of amorphous silicon carbon nitride (a-SiCN) films by ion-beam-assisted deposition (IBAD) and investigates their hardness and frictional properties. The a-SiCN films are deposited by IBAD via electron beam evap...