井上尚三   船越政伸   清水実結   吉木啓介   生津資大   
精密工学会誌 81(3) 276-280 2015年 [査読有り]
Metallic glass alloy can be a promising structural material for MEMS application because of its superior properties. However, there was limited information on fabrication and properties of thin metallic glass films. This paper reports the metallic...