Takeo Watanabe   Tetsuo Harada   Shinji Yamakawa   
Optics InfoBase Conference Papers 2022年
The R&D of basic technologies such as mask, resist, optical element, optics. have been carried out at NewSUBARU synchrotron light facility since 1996. EUV Lithography started use in production from 2019 for 7 nm node logic devices and from 2020 fo...