Masahito Niibe   Tetsuo Harada   Akira Heya   Takeo Watanabe   Naoto Matsuo   
AIP Conference Proceedings 2054 2019年1月 [査読有り]
© 2019 Author(s). In synchrotron radiation (SR) optical devices coated with oxidation-prone metal, such as Ni and Cr, the UV-O3 ashing method cannot be used for removal of the contaminated carbon film deposited during use in the beamline. We have ...