Journal of Electronic Materials 52(6) 4080-4090 2023年6月
The thermal stability of electroless nickel-phosphorus (Ni-P) film and cobalt-tungsten–phosphorus (Co-W-P) film deposited on GaAs substrate was investigated. X-ray photoelectron spectroscopy and x-ray diffraction measurements indicated that the Ni...
Journal of The Electrochemical Society 170(5) 052505-052505 2023年5月
Platinum (Pt) is one of the interesting catalysts in metal-assisted etching (metal-assisted chemical etching) of silicon (Si). The Pt-assisted etching induces not only the dissolution of Si under the Pt catalysts but also the formation of mesoporo...
Tsuyoshi Fujino   Naoki Fukumuro   Vijay Chouhan   Muneaki Ida   Yoshiaki Ida   Shinji Yae   
Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals 87(1) 18-23 2023年
The effect of electropolishing conditions on the outgassing properties of austenitic stainless steel (SUS316L) electropolished by a wiping method (WiEP) and an immersion method (ImEP) was investigated using thermal desorption spectroscopy. In the ...
Tsuyoshi Fujino   Naoki Fukumuro   Vijay Chouhan   Muneaki Ida   Yoshiaki Ida   Shinji Yae   
Journal of Vacuum Science and Technology B 40(6) 2022年12月
Surface and outgassing properties of 304 stainless steel samples were studied after electropolishing by a wiping method (WiEP) using felt that is attached to a cathode electrode and impregnated with an electrolyte. Surface morphology observed with...