LiFePO4 particles were prepared by the solid state reaction, and coated with conducting carbon layer through the hydrocarbon gas decomposition technique. The uniformity of the carbon layer was examined using the small angle X-ray diffra...
The composite cathodes were prepared using carbon wool as a current collector, where carbon-coated LiFePO4 fine particles and acetylene black particles were applied as active material and conducting additive, respectively. The composite...
2012 IEEE International Interconnect Technology Conference, IITC 2012 2012年 [査読有り]
It has become more serious concern to quantify Low-k damage in Cu/Low-k interconnects. We investigated the relationship between the amount of OH group in Low-k material obtained from micro-beam IR method and the interconnect capacitance. And it wa...
Japanese Journal of Applied Physics 50(5 PART 2) 2011年5月 [査読有り]
The effect of ultraviolet (UV) curing on film properties of porogen based porous SiOC (P-SiOC) film was investigated. The P-SiOC films were prepared by plasma-enhanced chemical vapor deposition (PECVD) using alkoxysilane and porogen (hydrocarbon)....
2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011 2011年 [査読有り]
In recent years, it has become more serious concern to achieve high reliability(EM, SM and TDDB) in Cu/Low-k interconnects. In this paper, we propose the simplest method to improve EM and SM reliability using the conventional SiCN deposition syste...