Proceedings of the 2009 IEEE International Interconnect Technology Conference, IITC 2009 101-103 2009年 [査読有り]
In order to control the characteristics of porogen-based porous SiOC film (k < 2.5), we investigated its dependence on the wavelengths of ultraviolet (UV) light by using methods of FT-IR, TDS and nano-indentation. As a result, it was found that sp...
Mitsuyasu Yatsuzuka Yoshihiro Oka Masahiko Nishijima Kenji Hiraga
Vacuum 83(1) 190-197 2008年9月 [査読有り]
The diamond-like carbon (DLC) film was prepared on various metal substrates with a plasma-based ion implantation and deposition using superimposed RF and negative high-voltage pulses. The adhesion strength of DLC film was enhanced above the epoxy ...
Diamond and Related Materials 17(3) 405-408 2008年3月 [査読有り]
A 400 μm thick diamond-like carbon (DLC) film was prepared on an aluminum alloy (A5052) substrate by a hybrid process of plasma-based ion implantation and deposition using toluene as a precursor gas. The plasma-based ion implantation during deposi...
Takayuki Utsumi Yoshihiro Oka Etsuo Fujiwara Mitsuyasu Yatsuzuka
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 257(1-2 SPEC. ISS.) 706-709 2007年4月 [査読有り]
Diamond-like carbon (DLC) films were prepared on aluminum alloy (A5052) and tungsten-carbide (WC) substrates with plasma-based ion implantation and deposition (PBIID) using hydrocarbon gas. Adhesion strength of DLC film was increased by the format...
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 257(1-2 SPEC. ISS.) 702-705 2007年4月 [査読有り]
This paper discusses the nano-interface between an aluminum alloy (A5052) substrate and diamond-like carbon (DLC) film prepared by a hybrid process of plasma-based ion implantation and deposition (PBIID) using superimposed RF and negative high-vol...
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