Pho van Bui   Daisetsu Toh   Shinsaku Shiroma   Taku Hagiwara   Ai Isohashi Osaka   Satoshi Matsuyama   Yasuhisa Sano   Kazuto Yamauchi   
Proceedings of the 20th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2020 43-44 2020年 [査読有り]
A catalytically assisted etching method was applied to planarization of Si surfaces for the ultra-precision fabrication of X-ray mirrors. The study demonstrates that an atomically smooth surface with less than 0.1 nm root-mean-square roughness cou...