Yuta Nakahira   Ai Isohashi   Tatsuaki Inada   Daisetsu Toh   Hideka Kida   Satoshi Matsuyama   Yasuhisa Sano   Kazuto Yamauchi   
ICPT 2017 - International Conference on Planarization/CMP Technology 110-114 2017年
A novel planarization method termed catalyst-referred etching (CARE) was developed, in which platinum and pure water were respectively employed as a catalyst and an etchant to create highly ordered surfaces with a step terrace structure on oxide m...