International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) , International steering committee, Program committee member
Takahito Yokota   Kensuke Kanda   Takayuki Fujita   Kazusuke Maenaka   
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2023-January 709-711 2023年
This paper reports on the improvement of the output power of piezoelectric energy harvesters (PEHs). A tapered thickness structure of a cantilever beam for uniform stress, tungsten proof mass, thick piezoelectric film, and series connection of the...
In this paper, we present a design approach for electrostatic energy harvester under low acceleration. In electrostatic energy harvester, the electrostatic force that prevents mass movement or causes pull-in is occurred due to the charged electret...
2015 JOINT IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRIC, INTERNATIONAL SYMPOSIUM ON INTEGRATED FUNCTIONALITIES AND PIEZOELECTRIC FORCE MICROSCOPY WORKSHOP (ISAF/ISIF/PFM) 178-181 2015年
This paper reports a batch fabrication process combining piezoelectric Pb(Zr, Ti)O-3 (PZT) thin films with photosensitive polymer SU-8. Fabricated PZT/SU-8 structure shows small stiffness and less brittleness. In addition, the piezoelectric charac...