International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) , International steering committee, Program committee member
Takahito Yokota   Kensuke Kanda   Takayuki Fujita   Kazusuke Maenaka   
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2023-January 709-711 2023年
This paper reports on the improvement of the output power of piezoelectric energy harvesters (PEHs). A tapered thickness structure of a cantilever beam for uniform stress, tungsten proof mass, thick piezoelectric film, and series connection of the...
Jun-ichi Inoue   Kensuke Kanda   Takayuki Fujita   Kazusuke Maenaka   
2013 IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRIC AND WORKSHOP ON THE PIEZORESPONSE FORCE MICROSCOPY (ISAF/PFM) 257-260 2013年
This paper reports depositions of double layers of thick Pb(Zr, Ti)O-3 films in order to realize piezoelectric bimorph structures for MEMS(micro electro-mechanical systems) applications. The PZT/PZT bimorph with the total thickness of 5.4 mu m, de...
Tomoya Tanaka   Takayuki Fujita   Koji Sonoda   Manabu Nii   Kensuke Kanda   Kazusuke Maenaka   Alex Chan Chun Kit   Sayaka Okochi   Kohei Higuchi   
World Automation Congress Proceedings 2012年12月
Continuous human monitoring is substantially useful to realize a high QoL (quality of life) society. In the previous work, we fabricated a prototype system for monitoring an electrocardiograph (ECG), heart rate (HR), 3 axes human body acceleration...
This paper reports an evaluation of a human vibration for autonomous power source that generate an electrical power from human vibration. The actual energy harvesting results from the MEMS (micro electromechanical systems) electret based energy ha...
S. Miki   T. Fujita   T. Kotoge   Y. G. Jiang   M. Uehara   K. Kanda   K. Higuchi   K. Maenaka   
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 1221-1224 2012年 [査読有り]
This study describes the fabrication and measurement of an electromagnetic-type energy harvester by using buried NdFeB/Ta multilayer films. The energy harvester is fabricated by bonding a vibratory mass with buried micro-magnets and a stator with ...
World Automation Congress Proceedings 2012年 [査読有り]
Electret materials are useful for electrostatic type energy harvesters. Since the power generated from the electret energy harvester is proportional to the surface charge concentration, i.e. charged voltage on the electret, frequency and dynamic r...