International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) , International steering committee, Program committee member
Takahito Yokota   Kensuke Kanda   Takayuki Fujita   Kazusuke Maenaka   
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2023-January 709-711 2023年
This paper reports on the improvement of the output power of piezoelectric energy harvesters (PEHs). A tapered thickness structure of a cantilever beam for uniform stress, tungsten proof mass, thick piezoelectric film, and series connection of the...
S. Tanaka   K. Sonoda   K. Kasai   K. Kanda   T. Fujita   K. Higuchi   K. Maenaka   
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 217-220 2011年 [査読有り]
We found that an appropriate mixture of SF6, C4F 8 and O2 gases in a standard Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) apparatus achieves crystal orientation dependent etching. The etched shapes after the RIE of silicon wafers wit...
K. Fujii   T. Toyonaga   T. Fujita   Y. G. Jiang   K. Higuchi   K. Maenaka   
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 2634-2637 2011年 [査読有り]
In this study, an electret based energy harvester with a single silicon structure that shares harvesting counter electrodes and charging grid is demonstrated. The shared electrode provide the batch fabrication process that can avoid the charge lea...