International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) , International steering committee, Program committee member
N. Miwatani   T. Fujita   Y. Kitagawa   K. Kanda   K. Maenaka   
16TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2016) 773 2016年
This paper reports an improvement of structure design of bipolar charged electret energy harvester to prevent an electrical discharge during a corona charging process on electret. We confirmed that differential output power of 33 mu W is obtained ...
S. Yoshii   K. Yamaguchi   T. Fujita   K. Kanda   K. Maenaka   
16TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2016) 773 2016年
This paper proposes collision-free structure using NdFeB thin-film magnet for vibration energy harvesters. By using stripe shaped NdFeB magnet array on the Si MEMS structure, we finally obtained 3 mN of magnetic repulsive force on 8 x 8 mm(2) spec...
JAPANESE JOURNAL OF APPLIED PHYSICS 54(10) 2015年10月 [査読有り]
Multimorph structures composed of multiple thin-film piezoelectric layers and electrode layers were realized by sputtering deposition. Cantilevers with four layers of Pb(Zr,Ti)O-3 (PZT) thin film are fabricated and evaluated. The electrical and pi...