Shota Taniwaki   Keiji Imanishi   Mitsuhiro Umano   Haruhiko Yoshida   Koji Arafune   Atsushi Ogura   Shin-ichi Satoh   Yasushi Hotta   
JOURNAL OF APPLIED PHYSICS 121(22) 2017年6月 [査読有り]
We studied the effective net charge density (Q(eff)) of strontium silicate (SrxSiOx+2, x = 1, 2, 3) films grown on silicon (Si) (100) substrates. The SrxSiOx+2 layers were deposited from a Sr2SiO4 polycrystalline target by pulsed laser deposition,...