Takuto Kojima   Tomihisa Tachibana   Nobuaki Kojima   Yoshio Ohshita   Koji Arafune   Atsushi Ogura   Masafumi Yamaguchi   
JAPANESE JOURNAL OF APPLIED PHYSICS 53(4) 04ER20.1-04ER20.6 2014年4月 [査読有り]
To study the impact of annealing on the nickel distribution and recombination activity at Sigma 3(n) coincident site lattice grain boundaries (CSL-GBs) in multicrystalline silicon, synchrotron-based X-ray analysis and the electron beam induced cur...
Hyunju Lee   Naomi Sawamoto   Norihiro Ikeno   Koji Arafune   Haruhiko Yoshida   Shin-ichi Satoh   Toyohiro Chikyow   Atsushi Ogura   
JAPANESE JOURNAL OF APPLIED PHYSICS 53(4) 04ER06.1-04ER06.4 2014年4月 [査読有り]
The effects of interface properties such as a negative fixed charge density and an interface trap density on the surface passivation of crystalline Si by O-3-based batch ALD AlOx were studied. High-quality surface passivation with S-max of similar...
Chikako Sakai   Shunsuke Yamamoto   Ko Urushibata   Shohei Miki   Koji Arafune   Haruhiko Yoshida   Hyun Ju Lee   Atsushi Ogura   Yoshio Ohshita   Shin-ichi Satoh   
JAPANESE JOURNAL OF APPLIED PHYSICS 52(12) 1-122303 2013年12月 [査読有り]
We studied the structure of ozone-based atomic layer deposited aluminium oxide (AIO(x)) films as a passivation layer for p-type crystalline silicon (c-Si) solar cells and focused on the differences in the structure by the production conditions of ...