Ko Urushibata   Chikako Sakai   Shohei Miki   Haruhiko Yoshida   Yasushi Hotta   Hyun Ju Lee   Atsushi Ogura   Shin-ichi Satoh   Koji Arafune   
23rd International Photovoltaic Science and Engineering Conference 2013年11月
To investigate the effect of initial oxidized layer condition on passivation quality of AlOx films deposited at room temperature by means of ozone-based atomic layer deposition technique, crystalline silicon substrates were exposed to ozone before...
Recombination properties at small-angle grain boundaries (SA-GBs) in multicrystalline silicon were evaluated. After Fe contamination, the electron-beam-induced current (EBIC) contrast at most SA-GBs became stronger, especially at >1.5 degrees. ...
Hyunju Lee   Tomihisa Tachibana   Norihiro Ikeno   Hiroki Hashiguchi   Koji Arafune   Haruhiko Yoshida   Shin-ichi Satoh   Toyohiro Chikyow   Atsushi Ogura   
APPLIED PHYSICS LETTERS 100(14) 2012年4月 [査読有り]
We have investigated the effects of deposition temperature and post-annealing on the passivation performance of AlOx films deposited by O-3-based atomic layer deposition for crystalline Si. We found that the dramatic enhancement in the passivation...