電気学会, 平成26年度電気学会論文誌E「センサ・マイクロマシン英文特集号」優秀論文賞,Electrostatic Energy Harvester Utilizing Bipolar Charging for High Output PowerK. Sonoda T. Onishi K. Minami K. Kanda T. Fujita K. Maenaka
電子情報通信学会, ELEX 2011 Best Paper Award,Ring laser oscillation using silicon (111) mirrors fabricated by MEMS technologyT. Hashimoto K. Makimura A. Miyamoto K. Kanda T. Fujita K. Maenaka
Takahito Yokota   Kensuke Kanda   Takayuki Fujita   Kazusuke Maenaka   
2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022 267-270 2022年
This paper reports thickness controls for cantilever beams of the piezoelectric energy harvester (PEH). The uniform stress structure for increasing output power and fillet structures for stress concentration relief of cantilever beams were fabrica...
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 68(5) 1988-1993 2021年5月 [査読有り]
To evaluate the characteristics of Pb(Zr,Ti)O3 (PZT) thin films (about 10~mu text{m} thick) with three different sputtering configurations - single-layer (SL) deposition, multilayer (ML) deposition with internal electrodes, and multistep (MS) depo...
12th International Conference on Miniaturized Systems for Chemistry and Life Sciences - The Proceedings of MicroTAS 2008 Conference 1387-1389 2008年1月
A novel concept of micromixer proposed in this study provides complex perturbation in a micromixer chamber. The chamber wall has meta-structure, which has multiple local masses on the chamber wall. Oscillation is applied to the metastructure with ...