Shawn Yohanes Siew Eric Jun Hao Cheung Haidong Liang Andrew Bettiol Noriaki Toyoda Bandar Alshehri Elhadj Dogheche Aaron J. Danner
Optics Express 26(4) 4421-4430 2018年2月 [査読有り]
Lithium niobate’s use in integrated optics is somewhat hampered by the lack of a capability to create low loss waveguides with strong lateral index confinement. Thin film single crystal lithium niobate is a promising platform for future applicatio...
Japanese Journal of Applied Physics 57(2) 2018年2月 [査読有り]
The irradiation conditions of gas cluster ion beam (GCIB) for surface-activated bonding (SAB) were investigated. Since GCIB realizes bombardment with low energy (∼several eV/atom) and dense-energy deposition, it modifies the near-surface layer wit...
International Journal of Automation Technology 12(2) 170-174 2018年 [査読有り]
In this study, the fundamental sputtering effects of gas cluster ion beams (GCIBs), especially for surface planarization, are reported. Because gas cluster ions are aggregates of thousands of gas atoms, the collision process for a GCIB, with dense...
JOURNAL OF PHYSICS D-APPLIED PHYSICS 50(18) 2017年5月 [査読有り]
In this work, atomic layer etching (ALE) with a gas cluster ion beam (GCIB) was investigated for the first time. Since gas cluster ions produce dense energy deposition without severe damage, effective, low-damage, and low-temperature removal of ch...
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