2017 5TH INTERNATIONAL WORKSHOP ON LOW TEMPERATURE BONDING FOR 3D INTEGRATION (LTB-3D) 66-66 2017年 [査読有り]
Gas cluster ion beam (GCIB) was used for surface activation bonding (SAB). Since GCIB modifies only near surface, low-damage surface modification and activation are expected. In this study, Cu-Cu bonding with GCIB irradiation was selected as a pre...
2017 5TH INTERNATIONAL WORKSHOP ON LOW TEMPERATURE BONDING FOR 3D INTEGRATION (LTB-3D) 5-5 2017年 [査読有り]
Preliminary experiments of gas cluster ion beam (GCIB) irradiation for wafer bonding were conducted. Unique irradiation effects of GCIB, such as low-damage irradiation and surface smoothing effects, will be beneficial for surface activated bonding...
Relatively low-temperature depositions of graphene like film on Ni substrate were studied using ethane gas cluster ion beam (GCIB). Ethane GCIBs realize shallow carbon implantation and create high temperature and high pressure conditions, which le...
The dependence of Ru, CoFe, and SiO2 etching with O-2-GCIB in an acetic acid atmosphere on the angle of incidence was studied. In the case where an acceleration voltage (Va) of 20 kV was used, the depth to which Ru was etched using O-2-GCIB with a...
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 371 317-321 2016年3月 [査読有り]
Crater-like defects formations with gas cluster ion beams (GCIB) were used as templates for carbon nanotube (CNT) growth. Upon a gas cluster ion impact, dense energy is deposited on a target surface while energy/atom of gas cluster ion is low, whi...
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