Surface smoothing of Ru used as underlayer of magnetic tunneling junctions (MTJ) in magneto-resistive random access memory (MRAM) was carried out with gas cluster ion beam (GCIB) in order to improve device characteristics. For Ru films, surface sm...
CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE 19(1) 12-18 2015年2月 [査読有り]
Cluster ion beam processing has been extensively developed during the 25 years since the concept originated. Low energy surface interaction effects, lateral sputtering phenomena and high-rate chemical reaction effects have been explored experiment...
23rd International Conference on the Application of Accelerators in Research and Industry - CAARI 2014 66 556-560 2015年 [査読有り]
Gas cluster ion beam (GCIB) shows unique irradiation effects such as surface smoothing, surface analysis, shallow implantation, surface smoothing, and thin film formations. Upon GCIB impact, dense energy is deposited on surface layer while energy/...
We present a novel method of using gas cluster ion beam irradiation (GCIB) to flatten and widen grains in silver films and structures, while simultaneously, reducing the film thickness with nanometer precision. Ultrathin Ag films produced by GCIB ...
Effects of water vapor during Ar-GCIB irradiations on poly-methyl methacrylate (PMMA) were investigated. Because of chemical reaction enhancement between PMMA and water vapor adsorbed on PMMA by GCIB irradiations, etching depth of PMMA with water ...