Ion beam assisted deposition (IBAD) has been widely used for high-quality coatings in various areas. In this chapter, we reviewed the fundamental characteristics of IBAD. In addition to the conventional IBAD technique, emerging IBAD techniques suc...
Noriaki Toyoda   Kensuke Sumie   Asahi Kimura   Isao Yamada   
JAPANESE JOURNAL OF APPLIED PHYSICS 53(5) 2014年5月 [査読有り]
Effects of background gas (N-2 or SF6) on ripple formation by oblique incidence gas cluster ion beam (GCIB) irradiation were investigated. When N2 gas was introduced as background gas, both ripple structures and the sputtering yield of Si and SiO2...
JAPANESE JOURNAL OF APPLIED PHYSICS 53(3) 2014年3月 [査読有り]
FeCo films of the type used in spin transfer torque magnetoresistive random access memory were etched by gas cluster ion beam (GCIB) irradiation with acetic acid vapor and characterized by in situ X-ray photoelectron spectroscopy. After 20 keV O-2...
A size-selected Ar gas cluster ion beam (GCIB) was applied to secondary ion mass spectrometry (SIMS) of a polystyrene (PS) thin film, a 1,4-didodecylbenzene (DDB) thin film, and an ITO glass sample. Additionally, the samples were analyzed by SIMS ...
Halogen free and low-temperature Cu etching was carried out using a gas cluster ion beam (GCIB) with acetic acid vapor. A very shallow Cu surface was oxidized by oxygen GCIB (O-2-GCIB). Simultaneously, reactions between CuO and acetic acid occurre...