Noriaki Toyoda   Akihiro Fujimoto   Isao Yamada   
Japanese Journal of Applied Physics 52(6) 2013年6月 [査読有り]
Irradiation effects of gas cluster ion beam (GCIB) were studied on Co 3Fe7 films as a novel etching process. Etching depth of Co 3Fe7 increased with increasing the acceleration voltage (Va) and the ionization electron voltage (Ve), however, there ...