年次大会 : Mechanical Engineering Congress, Japan 2015 "J2210101-1"-"J2210101-5" 2015年9月
In this paper, the influence of vacuum annealing on the mechanical properties of gold (Au) bonding wires is described. Au bonding wires with the diameter of 25μm are subjected to quasi-static uniaxial tensile tests at laboratory air. The bonding w...
年次大会 : Mechanical Engineering Congress, Japan 2015 "J2210302-1"-"J2210302-4" 2015年9月
Focused ion beam (FIB) is well known as a powerful tool for directly forming micro/nano-scale 3D mechanical structures without photolithography. By using FIB with Ga+ ions, we are able to conduct local etching as well as Ga+ ion implantation. The ...
年次大会 : Mechanical Engineering Congress, Japan 2015 "J2210204-1"-"J2210204-3" 2015年9月
In this paper, we evaluate the adhesive strength of Ag-Sn solder-jointed single-crystal silicon (SCS) micro specimens. The exothermic reaction in Al/Ni multilayer film is used as a heat source, which is able to generate heat enough to melt the sol...
Focused-ion-beam (FIB) is one of strong nanofabrication tools for silicon (Si) and its related devices. By FIB fabrication, the surface damages with Ga ion implantation are definitely induced, which will reduce the mechanical reliability of Si dev...
年次大会 : Mechanical Engineering Congress, Japan 2014 "J2240203-1"-"J2240203-4" 2014年9月
Sputtered Al/Ni multilayer films show self-propagating exothermic reaction, which can be provided by just applying very small energy into the films. The reaction performances are known to depend on the light-metal and transition-metals combination...