藤井 雅之   生津 資大   吉木 啓介   井上 尚三   
マイクロ・ナノ工学シンポジウム 2010(2) 71-72 2010年10月
We have developed biaxial tensile tester for thin film materials, which is able to measure mechanical properties under uniaxial and biaxial tensile stress states. This paper focuses on evaluating the effect of annealing on mechanical characteristi...