S Inoue   T Saeki   K Koterazawa   H Uchida   M Iwasa   
JOURNAL OF THE JAPAN INSTITUTE OF METALS 64(12) 1218-1223 2000年12月
We have deposited stainless steel films onto glass slides under various ion bombardment conditions by de unbalanced magnetron sputtering. The apparatus was equipped with an external coil around the magnetron cathode which allows us to alter the io...