Ginnosuke Ina Tatsuya Fujii Takahiro Kozeki Eri Miura Shozo Inoue Takahiro Namazu
JAPANESE JOURNAL OF APPLIED PHYSICS 56(6) 06GN17-6 pages 2017年6月 [査読有り]
In this study, we investigate the effects of focused ion beam (FIB)-induced damage and specimen size on the mechanical properties of Si nanowires (NWs) by a microelectromechanical system (MEMS)-based tensile testing technique. By an FIB fabricatio...
JAPANESE JOURNAL OF APPLIED PHYSICS 55(6) 06GL02-5 pages 2016年6月 [査読有り]
This paper describes a plastic reshaping technique for Si thin membranes by using focused ion beam (FIB) processing. FIB is used to locally pattern and implant Ga ions into the membranes. The combination of Ga ion doping and alkali wet etching ena...
JAPANESE JOURNAL OF APPLIED PHYSICS 55(6) 06GP12-6 pages 2016年6月 [査読有り]
In this paper, precise control of the shape, size, and porosity of porous silica submicron particles and their strength evaluation are described. Self-organization phenomenon of silica nanopowders and submicron polystyrene latex (PSL) balls in an ...
JAPANESE JOURNAL OF APPLIED PHYSICS 55(6) 06GL03-6 pages 2016年6月 [査読有り]
In this paper, we describe the influence of 700 degrees C vacuum annealing on strength and fracture behavior of micro-and nano-scale Si structures fabricated by focused ion beam (FIB). Si nanowires (NWs) made from silicon-on-nothing (SON) membrane...
This paper reports on two types of fabrication methods for Si nanowires (NWs) using focused ion beam (FIB), photolithography, TMAH anisotropic wet-etching, and sacrificial oxidation. Type A specimens made from silicon-on-nothing (SON) membranes ar...
Focused ion beam (FIB) is one of strong nanofabrication tools for Si and its related devices. In this study, To produce ultra-fine Si nanowires less than 50nm, we propose a new nanostructure fabrication technique using FIB and anisotropic etching....
The piezoresistive effect in silicon nanowires has attracted a great deal of interest for NEWS devices. Most of the piezoresistive SiNWs reported in the literature were fabricated using the bottom up method or top down processes such as electron b...
年次大会 : Mechanical Engineering Congress, Japan 2015 "J2210206-1"-"J2210206-3" 2015年9月
Sputtered multilayered films with sub-100nm thick bilayers made of titanium and silicon show self-propagating explosive reaction. The reaction has attractive characteristics, such as easy fabrication, easy activation, temperature rise up to 1000de...
年次大会 : Mechanical Engineering Congress, Japan 2015 "J2210102-1"-"J2210102-5" 2015年9月
Porous nanoparticles are very attractive as a carrier for next generation drug delivery. To reliably deliver the proper amount of a drug with to the diseased part, the size and porosity of the nanoparticles should be controlled precisely. The atom...
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