JOURNAL OF ENGINEERING MATERIALS AND TECHNOLOGY-TRANSACTIONS OF THE ASME 138(2) 021002-5 pages 2016年4月 [査読有り]
In this paper, the influences of specimen size and test temperature on the viscoelastic properties of SU-8 photoresist films are described. Films with the thicknesses of 1 mu m and 10 mu m are subjected to quasi-static uniaxial tensile tests and s...
In this paper, the effect of vacuum annealing on the mechanical properties of Au bonding wires is described. Au bonding wires with a diameter of 25 mu m are subjected to quasi-static uniaxial tensile tests in laboratory air. The bonding wire speci...
In this study, for the practical use of reactively alloyed NiAl as a structural material, its mechanical reliability is evaluated. An Al/Ni multilayer film is attractive as a local heat source for soldering. To investigate the difference in mechan...
In this paper, the design and development of an electrostatically actuated micro electromechanical systems (MEMS) device for the tensile test of Si nanowires (NWs) are described. The device is composed of a comb-drive electrostatic actuator for ge...
JOURNAL OF ENGINEERING MATERIALS AND TECHNOLOGY-TRANSACTIONS OF THE ASME 138(1) 011006-7 pages 2016年1月 [査読有り]
Self-propagating exothermic reaction bonding (SERB) technique with Al/Ni multilayer film is fascinating in the viewpoint of lots of outstanding features, such as atmosphere-independent exothermic reaction and its self-propagation. The reactively b...
This paper reports on two types of fabrication methods for Si nanowires (NWs) using focused ion beam (FIB), photolithography, TMAH anisotropic wet-etching, and sacrificial oxidation. Type A specimens made from silicon-on-nothing (SON) membranes ar...
Focused ion beam (FIB) is one of strong nanofabrication tools for Si and its related devices. In this study, To produce ultra-fine Si nanowires less than 50nm, we propose a new nanostructure fabrication technique using FIB and anisotropic etching....
The piezoresistive effect in silicon nanowires has attracted a great deal of interest for NEWS devices. Most of the piezoresistive SiNWs reported in the literature were fabricated using the bottom up method or top down processes such as electron b...
年次大会 : Mechanical Engineering Congress, Japan 2015 "J2210206-1"-"J2210206-3" 2015年9月
Sputtered multilayered films with sub-100nm thick bilayers made of titanium and silicon show self-propagating explosive reaction. The reaction has attractive characteristics, such as easy fabrication, easy activation, temperature rise up to 1000de...
年次大会 : Mechanical Engineering Congress, Japan 2015 "J2210102-1"-"J2210102-5" 2015年9月
Porous nanoparticles are very attractive as a carrier for next generation drug delivery. To reliably deliver the proper amount of a drug with to the diseased part, the size and porosity of the nanoparticles should be controlled precisely. The atom...