2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) 455-457 2016年 [査読有り]
This paper describes Si plastic reshaping technique, Si origami, by combining focused ion beam (FIB) processing and wet etching. FIB is used as a nano tool for local etching as well as Ga ion implantation. The combination of Ga ion doping and alka...
2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) 532-534 2016年 [査読有り]
This paper reports on the precise control of the shape, size, and porosity of porous silica nanoparticles by using the atomized heating method. Self-assembly phenomenon of silica nanopowders and submicron polystyrene latex (PSL) balls was used for...
JOURNAL OF ENGINEERING MATERIALS AND TECHNOLOGY-TRANSACTIONS OF THE ASME 137(3) 031011-7 pages 2015年7月 [査読有り]
Reactively bonded solder joints with Al/Ni exothermic films attract much attention in semiconductor and microelectromechanical systems (MEMS) industries. Higher bond strength of the joints is required for long-term mechanical reliability. We have ...
Metallic glass alloy can be a promising structural material for MEMS application because of its superior properties. However, there was limited information on fabrication and properties of thin metallic glass films. This paper reports the metallic...
This paper reports on two types of fabrication methods for Si nanowires (NWs) using focused ion beam (FIB), photolithography, TMAH anisotropic wet-etching, and sacrificial oxidation. Type A specimens made from silicon-on-nothing (SON) membranes ar...
Focused ion beam (FIB) is one of strong nanofabrication tools for Si and its related devices. In this study, To produce ultra-fine Si nanowires less than 50nm, we propose a new nanostructure fabrication technique using FIB and anisotropic etching....
The piezoresistive effect in silicon nanowires has attracted a great deal of interest for NEWS devices. Most of the piezoresistive SiNWs reported in the literature were fabricated using the bottom up method or top down processes such as electron b...
年次大会 : Mechanical Engineering Congress, Japan 2015 "J2210206-1"-"J2210206-3" 2015年9月
Sputtered multilayered films with sub-100nm thick bilayers made of titanium and silicon show self-propagating explosive reaction. The reaction has attractive characteristics, such as easy fabrication, easy activation, temperature rise up to 1000de...
年次大会 : Mechanical Engineering Congress, Japan 2015 "J2210102-1"-"J2210102-5" 2015年9月
Porous nanoparticles are very attractive as a carrier for next generation drug delivery. To reliably deliver the proper amount of a drug with to the diseased part, the size and porosity of the nanoparticles should be controlled precisely. The atom...
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