2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) 900-903 2015年 [査読有り]
In this paper, the effect of high-vacuum annealing with crystallinity-damage recovery on mechanical characteristics of Ga-implanted Si nanowires (NWs) fabricated by focused ion beam (FIB) is described. We have specially designed and developed "Bee...
JAPANESE JOURNAL OF APPLIED PHYSICS 53(6) 06JM01-5 pages 2014年6月 [査読有り]
In this paper, a new technique for fabricating self-propagating explosive Al/Ni flakes is described. Al/Ni multilayer films showing self-propagating exothermic reaction are deposited by dual-source dc sputtering onto a mesh substrate made of nylon...
This paper reports on two types of fabrication methods for Si nanowires (NWs) using focused ion beam (FIB), photolithography, TMAH anisotropic wet-etching, and sacrificial oxidation. Type A specimens made from silicon-on-nothing (SON) membranes ar...
Focused ion beam (FIB) is one of strong nanofabrication tools for Si and its related devices. In this study, To produce ultra-fine Si nanowires less than 50nm, we propose a new nanostructure fabrication technique using FIB and anisotropic etching....
The piezoresistive effect in silicon nanowires has attracted a great deal of interest for NEWS devices. Most of the piezoresistive SiNWs reported in the literature were fabricated using the bottom up method or top down processes such as electron b...
年次大会 : Mechanical Engineering Congress, Japan 2015 "J2210206-1"-"J2210206-3" 2015年9月
Sputtered multilayered films with sub-100nm thick bilayers made of titanium and silicon show self-propagating explosive reaction. The reaction has attractive characteristics, such as easy fabrication, easy activation, temperature rise up to 1000de...
年次大会 : Mechanical Engineering Congress, Japan 2015 "J2210102-1"-"J2210102-5" 2015年9月
Porous nanoparticles are very attractive as a carrier for next generation drug delivery. To reliably deliver the proper amount of a drug with to the diseased part, the size and porosity of the nanoparticles should be controlled precisely. The atom...
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