2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) 652-655 2014年 [査読有り]
We discuss the possibility of WC-Co cemented carbide as structural material in MEMS. The cemented carbide is typically used as material for working tool because it has superior characteristics, such as very high Young's modulus, excellent rigidity...
PROCEEDINGS OF THE ASME INTERNATIONAL TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC MICROSYSTEMS, 2013, VOL 1 2014年 [査読有り]
This paper describes the effects of specimen size, focused ion beam (FIB) induced damage, and annealing on the mechanical properties of sub-100nm-sized silicon (Si) nanowires (NWs) that were evaluated by means of uniaxial tensile testing. Si NWs w...
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 22(6) 1414-1427 2013年12月 [査読有り]
In this paper, the influence of thermal annealing on the elastic-plastic behavior of Al-Si-Cu films under uniaxial and biaxial tensile stress states is described. For the mechanical evaluation of the films, we used an in-plane biaxial tensile test...
JOURNAL OF ALLOYS AND COMPOUNDS 577(Suppl 1) S222-S226 2013年11月 [査読有り]
A novel method of preparing a large number of fiber-shaped Ni-Ti nano crystals with medium aspect ratio in the order of 10 was examined. A target of nickel-titanium shape memory alloy was sputter-deposited on a porous alumina membrane having holes...
JAPANESE JOURNAL OF APPLIED PHYSICS 52(11) 110118-9 pages 2013年11月 [査読有り]
In this paper, we describe an experimental technique to achieve a highly reliable characterization of the mechanical properties of silicon (Si) nanowires (NWs). A reusable on-chip Si device consisting of comb-drive electrostatic actuator for gener...
This paper reports on two types of fabrication methods for Si nanowires (NWs) using focused ion beam (FIB), photolithography, TMAH anisotropic wet-etching, and sacrificial oxidation. Type A specimens made from silicon-on-nothing (SON) membranes ar...
Focused ion beam (FIB) is one of strong nanofabrication tools for Si and its related devices. In this study, To produce ultra-fine Si nanowires less than 50nm, we propose a new nanostructure fabrication technique using FIB and anisotropic etching....
The piezoresistive effect in silicon nanowires has attracted a great deal of interest for NEWS devices. Most of the piezoresistive SiNWs reported in the literature were fabricated using the bottom up method or top down processes such as electron b...
年次大会 : Mechanical Engineering Congress, Japan 2015 "J2210206-1"-"J2210206-3" 2015年9月
Sputtered multilayered films with sub-100nm thick bilayers made of titanium and silicon show self-propagating explosive reaction. The reaction has attractive characteristics, such as easy fabrication, easy activation, temperature rise up to 1000de...
年次大会 : Mechanical Engineering Congress, Japan 2015 "J2210102-1"-"J2210102-5" 2015年9月
Porous nanoparticles are very attractive as a carrier for next generation drug delivery. To reliably deliver the proper amount of a drug with to the diseased part, the size and porosity of the nanoparticles should be controlled precisely. The atom...