JOURNAL OF MICROMECHANICS AND MICROENGINEERING 23(10) 105016-10 pages 2013年10月 [査読有り]
In this paper, the influences of pretreatment and hard baking on the mechanical characteristics of SU-8 microstructures are described. Four types of samples with different combinations of O-2 plasma ashing, primer coating and hard baking were prep...
Japanese Journal of Applied Physics 52(4) 045602-5 pages 2013年4月 [査読有り]
We have investigated the effects of bias voltage and substrate temperature on the growth process of RF-magnetron-sputtered BN films. When the negative bias voltage was higher than 80 V, films including the sp3-BN phase grew even if the substrate t...
We have been studying the surface discharge plasma generated by insulating capillary tube as an ablation gun for depositing diamond-like carbon films. It is found in our series of experiments that applying a positive voltage to the gun of the syst...
This paper reports on two types of fabrication methods for Si nanowires (NWs) using focused ion beam (FIB), photolithography, TMAH anisotropic wet-etching, and sacrificial oxidation. Type A specimens made from silicon-on-nothing (SON) membranes ar...
Focused ion beam (FIB) is one of strong nanofabrication tools for Si and its related devices. In this study, To produce ultra-fine Si nanowires less than 50nm, we propose a new nanostructure fabrication technique using FIB and anisotropic etching....
The piezoresistive effect in silicon nanowires has attracted a great deal of interest for NEWS devices. Most of the piezoresistive SiNWs reported in the literature were fabricated using the bottom up method or top down processes such as electron b...
年次大会 : Mechanical Engineering Congress, Japan 2015 "J2210206-1"-"J2210206-3" 2015年9月
Sputtered multilayered films with sub-100nm thick bilayers made of titanium and silicon show self-propagating explosive reaction. The reaction has attractive characteristics, such as easy fabrication, easy activation, temperature rise up to 1000de...
年次大会 : Mechanical Engineering Congress, Japan 2015 "J2210102-1"-"J2210102-5" 2015年9月
Porous nanoparticles are very attractive as a carrier for next generation drug delivery. To reliably deliver the proper amount of a drug with to the diseased part, the size and porosity of the nanoparticles should be controlled precisely. The atom...
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