Jing Yupeng   Maenaka Kazusuke   Nishioka Hiroshi   IOKU Sunao   FUJITA Takayuki   TAKAYAMA Yoichiro   
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 123(3) 79-84 2003年3月
This paper presents the quantitative analysis and influence of CO<sub>2</sub> dissolved in TMAH for silicon etching. The etching rate on the (100) plane increases at first and then decreases with the increase of CO<sub>2</sub&...